Collaborative Smart Manufacturing Enables Sustainable SubFab Vacuum and Abatement and Cleanroom Operations

Sustainable SubFab and Clean Room operations are enabled by improving key metrics including maximizing process tool uptime and scheduled to unscheduled down ratio (M-ratio) and minimizing energy use and facilities consumption. This can be achieved by collaboratively leveraging Smart Manufacturing (SM) techniques to ensure processes, machines, data, and people work together effectively to achieve the best results. Barriers to SM adoption include hard to quantify metrics and the distributed nature of the ROI. We will illustrate with real-world examples from Pilot line and HVM environments how we have used a combination of data analytics and Best-Known Methods to enable customers to optimize productivity, identify suitable metrics for ROI and quantify the environmental impact.