Smarter Fab Operations—AI-Driven Equipment Performance Visibility

We take use cases from etching, metrology, deposition, and equipment qualification to look at the benefits of discovering and monitoring multivariate, temporal patterns in equipment data. In particular, we look at how time series AI augments human understanding of and, ultimately, enables the use of those patterns. This talk will present applications for identifying process variability and proactive maintenance. We also describe the end user interfaces which facilitate equipment and process SME's work as well as an edge computing architecture that supports the fab's need for data protection.